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QUARTZ

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SICO uses fused silica and fused quartz to manufacture components widely needed in the optical and semiconductor industry.

SICO products provide all common applications such as HT, CVD, EPI,... 

Quartz glass is produced from silicon dioxide and is a highly pure material. Quartz glass has superior thermal and optical properties and is used widely in semiconductor processes.

Sico Technology is producing two types of quartz glass

Natural fused quartz SILUX

SILUX®- Glasses are produced by flame fusing chemically and physically pretreated and selected natural crystal quartz.

Synthetic fused silica SQE, SQ 0, SQ 1, SQ 2 mostly used for optical applications

SQ-Glasses are synthetic quartz glasses produced from high purity SiCl4, by the flame pyrolysis method. These glasses are free of bubbles and inclusions and are distinguished from other glasses by good transmission in UV and visible spectral range. The types SQ 0 – SQ 2 are different regarding to homogeneity, layers, inclusions and transmission in the deep UV range.

Sico is qualified for the following quartz raw material suppliers:

  • Heraeus HSQ 100 / 300 / 400 / ...

  • ...

Sico Quartz Parts

Furnace Parts

  • all OEM

  • Carrier

  • Liner & Tube

  • Pedestal

  • Injector

  • ... and various other parts 

Etch Parts

  • Sleeve

  • Belljar

  • ... and various other parts

Epitaxy Parts

  • all OEM

  • Chamber ATM/RP

  • Susceptor & Spider with or without interlock

  • Upper/ lower Dome

  • Upper/ lower Liner

  • Susceptor Support Shaft

  • ... and various other parts

Others

 

Contact us, let us know your wishes!

Quartz Refurbishing

  • EPI

  • ASM Kammer

  • all kinds of parts