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SILICON

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Sico silicon products are the first choice for use in semiconductor poly, nitride and CVD processes.

High purity semiconductor grade silicon is the raw material for wafers.
Sico machines extremly high pure silicon for silicon process tubes, injectors, pedestals and carrierboats.

 

The materials high temperature capability and the same thermal expansion coefficient as the wafers, helps the customer to reduce particle defects and slips.
Sico can machine silicon and form it into shapes, only known from quartz until now.

Longfinger, Connection, Vertical, Carrier, Boat, Silicon, Silizium

Sico's Special Connection technologies

Glassing Technology for silicon products

  • for high temperature applications ( up to 1200 ° C ) , acid resistant

Crystallisation for silicon products

  • for high temperature applications ( up to 1300 ° C ) , acid resistant

Material Characteristics

Devitrification

1200 t0 1300 °C

Coefficient of thermal Expansion

Thermal conductivity (1000 °C)

Estimated costs of ownership

Slip at 1200 °C

Purit
y
Silicon

No

Stable

Similar to silicon wafer

Similar to wafer

100%

None

0.35
Quartz

Yes

Plastic, Warps

-5 Times less

-10 Times higher

-380%

N.A.

4.1
SiC

No

Stable

-1.85 Times more

-10% less

-195%

Yes

1.45

Sico Silicon Parts

Carrier, Boat

  • Vertical and Horizontal Silicon-Carriers

  • all wafer sizes up to 300mm

  • all OEM

  • customisation

  • usable for processes like LPCVD Poly-Si, SiN

  • various high temperature applications, like Oxyde, Annealing up to 1300°C

  • special surface options to match your process requirements  

Ring

  • All kind of Silicon-Focus-Rings up to 460mm

  • all OEM

  • customer specific designs

Injector

Silicon-injectors are use in poly process, maintain high mechanical strength, without plastic deformation, attemperatures up to 1300°C. They significantly reduce particle bursts and do not break due to film stress. Various designs like round, flat, dual or even customized is possible.

  • all OEM

  • customer specific designs

Liner & tube

Sico Silicon Liners and Tubes provide a uniform path

for the gas flow from Inlet to exhaust, and are needed for your batch processing equipment.

  • all OEM

  • customer specific designs

Pedestal