SILICON
Sico silicon products are the first choice for use in semiconductor poly, nitride and CVD processes.
High purity semiconductor grade silicon is the raw material for wafers.
Sico machines extremly high pure silicon for silicon process tubes, injectors, pedestals and carrierboats.
The materials high temperature capability and the same thermal expansion coefficient as the wafers, helps the customer to reduce particle defects and slips.
Sico can machine silicon and form it into shapes, only known from quartz until now.
Sico's Special Connection technologies
Glassing Technology for silicon products
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for high temperature applications ( up to 1200 ° C ) , acid resistant
Crystallisation for silicon products
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for high temperature applications ( up to 1300 ° C ) , acid resistant
Material Characteristics
Devitrification
1200 t0 1300 °C
Coefficient of thermal Expansion
Thermal conductivity (1000 °C)
Estimated costs of ownership
Slip at 1200 °C
Purity
Silicon
No
Stable
Similar to silicon wafer
Similar to wafer
100%
None
0.35
Quartz
Yes
Plastic, Warps
-5 Times less
-10 Times higher
-380%
N.A.
4.1
SiC
No
Stable
-1.85 Times more
-10% less
-195%
Yes
1.45
Sico Silicon Parts
Carrier, Boat
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Vertical and Horizontal Silicon-Carriers
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all wafer sizes up to 300mm
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all OEM
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customisation
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usable for processes like LPCVD Poly-Si, SiN
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various high temperature applications, like Oxyde, Annealing up to 1300°C
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special surface options to match your process requirements
Ring
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All kind of Silicon-Focus-Rings up to 460mm
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all OEM
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customer specific designs
Injector
Silicon-injectors are use in poly process, maintain high mechanical strength, without plastic deformation, attemperatures up to 1300°C. They significantly reduce particle bursts and do not break due to film stress. Various designs like round, flat, dual or even customized is possible.
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all OEM
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customer specific designs
Liner & tube
Sico Silicon Liners and Tubes provide a uniform path
for the gas flow from Inlet to exhaust, and are needed for your batch processing equipment.
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all OEM
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customer specific designs